Despiau-Pujo, E. : rechercher sur Z-Library

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1

Helium plasma modification of Si and Si 3 N 4 thin films for advanced etch processes

Martirosyan, Vahagn, Despiau-Pujo, Emilie, Dubois, Jerome, Cunge, Gilles, Joubert, Olivier

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Année:

2018

Langue:

english

Fichier:

PDF, 2.50 MB

english, 2018

2

Roughness generation during Si etching in Cl 2 pulsed plasma

Mourey, Odile, Petit-Etienne, Camille, Cunge, Gilles, Darnon, Maxime, Despiau-Pujo, Emilie, Brichon, Paulin, Lattu-Romain, Eddy, Pons, Michel, Joubert, Olivier

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Année:

2016

Langue:

english

Fichier:

PDF, 1.55 MB

english, 2016

3

H+ ion-induced damage and etching of multilayer graphene in H2 plasmas

Davydova, A., Despiau-Pujo, E., Cunge, G., Graves, D. B.

Journal:

Journal of Applied Physics

Année:

2017

Langue:

english

Fichier:

PDF, 2.43 MB

english, 2017

4

Chemical composition of marine aerosol in the mediterranean coastal zone during the FETCH campaign

K. Sellegri, J. Gourdeau, S. Despiau-Pujo

Journal:

Journal of Aerosol Science

Année:

1999

Langue:

english

Fichier:

PDF, 124 KB

english, 1999

5

Elementary processes of H2 plasma-graphene interaction: A combined molecular dynamics and density functional theory study

Despiau-Pujo, E., Davydova, A., Cunge, G., Delfour, L., Magaud, L., Graves, D. B.

Journal:

Journal of Applied Physics

Année:

2013

Langue:

english

Fichier:

PDF, 1.66 MB

english, 2013

6

MD simulations of low energy Clx+ ions interaction with ultrathin silicon layers for advanced etch processes

Brichon, Paulin, Despiau-Pujo, Emilie, Joubert, Olivier

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Année:

2014

Langue:

english

Fichier:

PDF, 1.78 MB

english, 2014

7

Comparison between fluid simulations and experiments in inductively coupled argon/chlorine plasmas

Corr, C S, Despiau-Pujo, E, Chabert, P, Graham, W G, Marro, F G, Graves, D B

Journal:

Journal of Physics D Applied Physics

Année:

2008

Langue:

english

Fichier:

PDF, 255 KB

english, 2008

8

Velocity distribution function of sputtered gallium atoms during inductively coupled argon plasma treatment of a GaAs surface

Despiau-Pujo, Emilie, Chabert, Pascal, Ramos, Raphaël, Cunge, Gilles, Sadeghi, Nader

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Année:

2009

Langue:

english

Fichier:

PDF, 660 KB

english, 2009

9

MD simulations of GaN sputtering by Ar[sup +] ions: Ion-induced damage and near-surface modification under continuous bombardment

Despiau-Pujo, Emilie, Chabert, Pascal

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Année:

2010

Langue:

english

Fichier:

PDF, 521 KB

english, 2010

10

Low energy Ar[sup +] bombardment of GaN surfaces: A statistical study of ion reflection and sputtering

Despiau-Pujo, Emilie, Chabert, Pascal

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Année:

2010

Langue:

english

Fichier:

PDF, 507 KB

english, 2010

11

Molecular dynamics simulations of GaAs sputtering under low-energy argon ion bombardment

Despiau-Pujo, Emilie, Chabert, Pascal, Graves, David B.

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Année:

2008

Langue:

english

Fichier:

PDF, 673 KB

english, 2008

12

Simulations of radical and ion fluxes on a wafer in a Cl[sub 2]/Ar inductively coupled plasma discharge: Confrontation with GaAs and GaN etch experiments

Despiau-Pujo, Emilie, Chabert, Pascal, Bansropun, Shailendra, Thénot, Didier, Plouhinec, Patrick, Cassette, Simone

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Année:

2010

Langue:

english

Fichier:

PDF, 644 KB

english, 2010

13

Pulsed Cl 2 /Ar inductively coupled plasma processing: 0D model versus experiments

Despiau-Pujo, E, Brihoum, M, Bodart, P, Darnon, M, Cunge, G

Journal:

Journal of Physics D Applied Physics

Année:

2014

Langue:

english

Fichier:

PDF, 1.64 MB

english, 2014

14

Global model of instabilities in low-pressure inductive chlorine discharges

Despiau-Pujo, E, Chabert, P

Journal:

Plasma Sources Science and Technology

Année:

2009

Langue:

english

Fichier:

PDF, 603 KB

english, 2009

15

Etching mechanisms of graphene nanoribbons in downstream H 2 plasmas: insights from molecular dynamics simulations

Davydova, A, Despiau-Pujo, E, Cunge, G, Graves, D B

Journal:

Journal of Physics D Applied Physics

Année:

2015

Langue:

english

Fichier:

PDF, 1.68 MB

english, 2015

16

Hydrogen Plasmas Processing of Graphene Surfaces

Despiau-Pujo, Emilie, Davydova, Alexandra, Cunge, Gilles, Graves, David B.

Journal:

Plasma Chemistry and Plasma Processing

Année:

2016

Langue:

english

Fichier:

PDF, 1.50 MB

english, 2016

17

[IEEE 2014 Silicon Nanoelectronics Workshop (SNW) - Honolulu, HI, USA (2014.6.8-2014.6.9)] 2014 Silicon Nanoelectronics Workshop (SNW) - MD simulations of chlorine plasmas interaction with ultrathin silicon films for advanced etch processes

Brichon, P., Despiau-Pujo, E., Mourey, O., Petit-Etienne, C., Cunge, G., Darnon, M., Joubert, O.

Année:

2014

Langue:

english

Fichier:

PDF, 1.42 MB

english, 2014

18

Cleaning graphene: A first quantum/classical molecular dynamics approach

Delfour, L., Davydova, A., Despiau-Pujo, E., Cunge, G., Graves, D. B., Magaud, L.

Journal:

Journal of Applied Physics

Année:

2016

Langue:

english

Fichier:

PDF, 1.30 MB

english, 2016

19

Key plasma parameters for nanometric precision etching of Si films in chlorine discharges

Brichon, P., Despiau-Pujo, E., Mourey, O., Joubert, O.

Journal:

Journal of Applied Physics

Année:

2015

Langue:

english

Fichier:

PDF, 3.08 MB

english, 2015

20

Measuring ion velocity distribution functions through high-aspect ratio holes in inductively coupled plasmas

Cunge, G., Darnon, M., Dubois, J., Bezard, P., Mourey, O., Petit-Etienne, C., Vallier, L., Despiau-Pujo, E., Sadeghi, N.

Journal:

Applied Physics Letters

Année:

2016

Langue:

english

Fichier:

PDF, 1.02 MB

english, 2016

21

Modification mechanisms of silicon thin films in low-temperature hydrogen plasmas

Martirosyan, Vahagn, Joubert, Olivier, Despiau-Pujo, Emilie

Journal:

Journal of Physics D Applied Physics

Année:

2018

Langue:

english

Fichier:

PDF, 1.44 MB

english, 2018